pec pad + eclipse solution, but beware, anything else may scratch the sensor filter cover. I took a lens pen to my sensor, and got a few scuffs on my sensor 
good thing is that the scuffs dont show up on the image, even at F22, however dust definitely shows up much sooner.
problem with the eclipse solution is that it can leave a film, best to experiment on a cheaper camera first, I did the cleaning many times on the original 5Dc without issues, but my A7r got the scuffs. Not a big deal since it doesnt show up, but to fix it, I would have to send to kolari and likely get the thin sensor stack while I'm at it.
Sony A7siii/A7iv/ZV-1 - FE 24/1.4 - SY 24/2.8 - FE 35/2.8 - FE 50/1.8 - FE 85/1.8 - F 600/5.6 - CZ 100-300 - Tamron 17-28/2.8 - 28-75/2.8 - 28-200 RXD
Panasonic GH6 - Laowa 7.5/2 - PL 15/1.7 - P 42.5/1.8 - OM 75/1.8 - PL 10-25/1.7 - P 12-32 - P 14-140