Don't try and use the blower on the screens while they are in the mirror box, remove them first, otherwise dust will be pushed deeper inside the pentaprism by the force of the air.
This is the proper process, you may not need the wet clean, so try the blower first, an extremely soft brush like an artic butterfly can also be used using a very soft swipe, the static on the brush picks up the dirt, rather than the brush brushing it off.
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These screens are extremely fragile and will stain and scratch very easily.
If you need to remove the SI screen watch out for the small screws and the metal shims, dropping the screws into the camera body or bending the shims could be problematic.